{"product_id":"atomic-layer-deposition-2e-9781118062777","title":"Atomic Layer Deposition 2e","description":"Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.\u003cbr\u003e\u003cbr\u003e\u003cb\u003eAuthor:\u003c\/b\u003e Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen\u003cbr\u003e\u003cb\u003ePublisher:\u003c\/b\u003e Wiley-Scrivener\u003cbr\u003e\u003cb\u003ePublished:\u003c\/b\u003e 05\/28\/2013\u003cbr\u003e\u003cb\u003ePages:\u003c\/b\u003e 272\u003cbr\u003e\u003cb\u003eBinding Type:\u003c\/b\u003e Hardcover\u003cbr\u003e\u003cb\u003eWeight:\u003c\/b\u003e 1.25lbs\u003cbr\u003e\u003cb\u003eSize:\u003c\/b\u003e 9.30h x 6.10w x 0.90d\u003cbr\u003e\u003cb\u003eISBN:\u003c\/b\u003e 9781118062777\u003cbr\u003e\u003cp\u003e\u003cb\u003eAbout the Author\u003c\/b\u003e\u003cbr\u003e\u003c\/p\u003e\u003cp\u003e\u003cb\u003eTommi Kääriäinen\u003c\/b\u003e is a researcher at the Advanced Surface Technology Research Laboratory (ASTRaL) in Lappeenranta University of Technology (LUT), Finland. He has over nine years of experience in thin film deposition and analytical techniques. He has especially focused on atomic layer deposition (ALD) at low temperatures and recently on spatial and roll-to-roll ALD.\u003c\/p\u003e \u003cp\u003e\u003cb\u003eDavid Cameron\u003c\/b\u003e received his BSc in electrical and electronic engineering from the University of Glasgow in 1972. In 2004, he joined LUT as Professor of Material Technology and Director of ASTRaL. His research career has been in the area of thin film deposition and since joining ASTRaL, his work has focused on ALD. He has also worked on molecular beam epitaxy, plasma chemical vapour deposition, magnetron sputtering, and sol-gel deposition.\u003c\/p\u003e \u003cp\u003e\u003cb\u003eMarja-Leena Kääriäinen\u003c\/b\u003e has conducted ALD research for over 10 years. Her focus has been on the growth and structure of nanoscale metal oxide films. She has a particular interest in the photoactivity, photocatalytic activity, and antibacterial properties of ALD-grown thin films. Her background is in chemical engineering, which she studied at LUT and Michigan Technological University. Currently, she is a researcher at ASTRaL.\u003c\/p\u003e \u003cp\u003e\u003cb\u003eArthur Sherman\u003c\/b\u003e has 60 years of industrial experience, which includes almost 20 years with General Electric, seven years on the corporate staff of RCA, several years at Applied Materials, and six years at Varian Associates. He earned a master's degree in aeronautical engineering at Princeton University and a PhD at the University of Pennsylvania. He has published extensively, including approximately 50 research papers published in archive journals and three scientific monographs.\u003c\/p\u003e\u003cbr\u003e\u003cp\u003e\u003ci\u003eThis title is not returnable\u003c\/i\u003e\u003cbr\u003e\u003c\/p\u003e","brand":"Wiley-Scrivener","offers":[{"title":"Hardcover","offer_id":40677857558643,"sku":"9.78112E+12","price":365.53,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0555\/9255\/0515\/products\/img_3f821865-a6c5-4df5-b39c-494fdad881d3.jpg?v=1674571929","url":"https:\/\/bookstorenmore.com\/products\/atomic-layer-deposition-2e-9781118062777","provider":"Bookstore N More","version":"1.0","type":"link"}