Euv Lithography

EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.

Author: Vivek Bakshi
Publisher: Wiley
Published: 12/01/2008
Pages: 702
Binding Type: Hardcover
Weight: 3.43lbs
Size: 10.00h x 7.00w x 1.70d
ISBN: 9780470471555

About the Author

Vivek Bakshi is the President of EUV Litho, Inc. He was previously a senior member of the technical staff of Sematech, Inc.
Dr. Bakshi studied at the University of Texas at Austin; the University of Idaho; and the Indian Institute of Technology at Kanpur.

This title is not returnable