Optical Inspection of Microsystems

This book offers a timely review of research into applying optical measurement techniques for microsystems. These techniques are non-invasive and fieldwise in character and have high sensitivity, accuracy, and resolution of data points. This text presents state-of-the-art methods of optical analysis and enumerates their basic components.

Author: Wolfgang Osten
Publisher: CRC Press
Published: 10/17/2019
Pages: 532
Binding Type: Paperback
Weight: 2.80lbs
Size: 9.90h x 7.00w x 1.30d
ISBN: 9780367390570